
描述
KLA Altair 8920i AOI Tool KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination Fastest Available Excursion Monitoring Capability for >0.2 um Defects Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X High Performance Review Objective: 35X Low Warpage Chuck for 6” & 8” Wafers Multi-Region Based Thresholding Advanced Detection Algorithms Automated Review Sampling Brightfield Review Mode Litho Bevel Centricity Autofocus Capability Rules Based Binning配置
無配置OEM 代工型號說明
未提供文檔
無文檔
類別
AOI
上次驗證: 8 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153745
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
Altair 8920i
類別
AOI
上次驗證: 8 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153745
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
KLA Altair 8920i AOI Tool KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination Fastest Available Excursion Monitoring Capability for >0.2 um Defects Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X High Performance Review Objective: 35X Low Warpage Chuck for 6” & 8” Wafers Multi-Region Based Thresholding Advanced Detection Algorithms Automated Review Sampling Brightfield Review Mode Litho Bevel Centricity Autofocus Capability Rules Based Binning配置
無配置OEM 代工型號說明
未提供文檔
無文檔