RITE TRACK / ASML / SVG

90-S

The SVG 8800 is a single track dispense photoresist spinner that has automatic cassette wafer handling. It can handle 150mm wafers. It has a programmable dispense arm motion that can be programmed temperatures up to 300 C. The SVG 8800's high acceleration brushless spindle motor is capable of attaining 50,000 RPM/second.

8800

The 88 series uses an enhanced in-line robotic transfer arm between each module which makes critical transfers, such as between soft bake and chill, much more easily controlled compared to a totally random robotic system. The 88 Series is ideal for submicron manufacturing and is capable of processing 3″ through 150 mm substrates including Silicon, GaAs, Sapphire, GGG, Lithium Niobate, thin film heads, MEMS and many other substrate types.

8632

8600

8620

8826

90-SE

8626

8132 CTD/8136 HPO

TRACK 2

8836

SVG 7000

The ProCell is designed for 200-mm advanced fabrication processes with line widths of .18 micron and beyond. The ProCell, which can process more than 40 wafers simultaneously offers scalability from 200-mm to-300-mm wafers and significant productivity improvement for the coat and develop process through the use of ProCell’s symmetrical cluster configuration. The ProCell has enhanced reliability, uniformity in process results and serviceability due to the use of a single software platform, cell based design and the use of isolated process and coat environments. 

RITE TRACK / ASML / SVG

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