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描述
4DC1, 3LP ALD TOOL配置
無配置OEM 代工型號說明
Eagle XP8 is a high productivity 300mm tool for PEALD applications. The Eagle XP8 PEALD system can be configured with up to four Dual Chamber Modules (DCM), enabling eight chambers in high volume production within a very compact footprint.文檔
無文檔
ASM
EAGLE XP8
類別
ALD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
115353
晶圓尺寸:
未知
年份:
未知
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Refurbishment Services
Available
描述
4DC1, 3LP ALD TOOL配置
無配置OEM 代工型號說明
Eagle XP8 is a high productivity 300mm tool for PEALD applications. The Eagle XP8 PEALD system can be configured with up to four Dual Chamber Modules (DCM), enabling eight chambers in high volume production within a very compact footprint.文檔
無文檔