描述
90nm KrF Scanner配置
Uniformity(1.811%), Intensity(24299.68W/m2), 6" Reticle Inline((R->L), Cymer Laser(ELS-7310). Fab out (Jan. 2019)OEM 代工型號說明
KrF photolithography system supports high-volume manufacturing of semiconductor devices. The ES6a scanning stepper utilizes Canon’s Advanced Flexible Illumination System (AFIS) to resolve 90 nanometer features.文檔
無文檔
CANON
FPA-6000ES6a
已驗證
類別
248nm DUV
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
95106
晶圓尺寸:
12"/300mm
年份:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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CANON
FPA-6000ES6a
類別
248nm DUV
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
95106
晶圓尺寸:
12"/300mm
年份:
2007
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
90nm KrF Scanner配置
Uniformity(1.811%), Intensity(24299.68W/m2), 6" Reticle Inline((R->L), Cymer Laser(ELS-7310). Fab out (Jan. 2019)OEM 代工型號說明
KrF photolithography system supports high-volume manufacturing of semiconductor devices. The ES6a scanning stepper utilizes Canon’s Advanced Flexible Illumination System (AFIS) to resolve 90 nanometer features.文檔
無文檔