描述
Single Wafer Processing配置
Process: SWC Tool config is based on original PO, please verify tool details at tool inspection Chamber R1 & Chamber R2 & Chamber L1 & Chamber L2 Mde. 1:49%HF Med. 2: Poly DI Dispenser N2 Dispemser: Bronkhost Mass Flow Contriller Chuck N2 MFC Chuck: Advanced Pin Chuck Medium1 Chemical: HF(49%) Temperature control: B&R controller, Inlineheater Lufran 6KW*2 Circulation pump: :evitronix BPS-3 Filter: Entegris Concentration Monditor: NA Medium2 Chemical: Poly Temperature control: B&R controller, Inlineheater Lufran 6KW Circulation pump: Levitronix BPS-3 Filter: Entegris Concentration Monditor: Horiba CS-100 series Damage/Missing parts list Please inspect tool to reconfirmOEM 代工型號說明
The DV-34BF is part of the Da Vinci Series, a single-wafer processing technology platform designed for high-volume manufacturing. It addresses new cleaning requirements for polymer removal and backside etch and clean, providing high-throughput and accurate wafer cleaning to maximize device yields. The four-chamber system performs a wide range of back-and frontside processes on 300 mm wafers and is optimized for emerging technologies such as high-k dielectrics, new metal gates, and non-volatile memory devices. It offers optimized process performance, high throughput, minimized footprint, advanced handling, reduced media consumption, flexible chemistry application, higher reliability, resulting in low CoO.文檔
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LAM RESEARCH / SEZ
DV-34BF
已驗證
類別
Wet Etch
上次驗證: 5 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
22980
晶圓尺寸:
12"/300mm
年份:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
DV-34BF
類別
Wet Etch
上次驗證: 5 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
22980
晶圓尺寸:
12"/300mm
年份:
2007
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Single Wafer Processing配置
Process: SWC Tool config is based on original PO, please verify tool details at tool inspection Chamber R1 & Chamber R2 & Chamber L1 & Chamber L2 Mde. 1:49%HF Med. 2: Poly DI Dispenser N2 Dispemser: Bronkhost Mass Flow Contriller Chuck N2 MFC Chuck: Advanced Pin Chuck Medium1 Chemical: HF(49%) Temperature control: B&R controller, Inlineheater Lufran 6KW*2 Circulation pump: :evitronix BPS-3 Filter: Entegris Concentration Monditor: NA Medium2 Chemical: Poly Temperature control: B&R controller, Inlineheater Lufran 6KW Circulation pump: Levitronix BPS-3 Filter: Entegris Concentration Monditor: Horiba CS-100 series Damage/Missing parts list Please inspect tool to reconfirmOEM 代工型號說明
The DV-34BF is part of the Da Vinci Series, a single-wafer processing technology platform designed for high-volume manufacturing. It addresses new cleaning requirements for polymer removal and backside etch and clean, providing high-throughput and accurate wafer cleaning to maximize device yields. The four-chamber system performs a wide range of back-and frontside processes on 300 mm wafers and is optimized for emerging technologies such as high-k dielectrics, new metal gates, and non-volatile memory devices. It offers optimized process performance, high throughput, minimized footprint, advanced handling, reduced media consumption, flexible chemistry application, higher reliability, resulting in low CoO.文檔
無文檔