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描述
Stress Measurement配置
無配置OEM 代工型號說明
The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.文檔
無文檔
KLA
FLX 5400
類別
Thin Film / Film Thickness
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
122878
晶圓尺寸:
8"/200mm
年份:
未知
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描述
Stress Measurement配置
無配置OEM 代工型號說明
The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.文檔
無文檔