概述

The NanoSpec® 9000 Series is an Integrated Metrology® Copper Laser Profiler System designed for integration into semiconductor wafer processing equipment. The NanoSpec 9000 and NanoSpec 9000i are ultra-compact measurement platforms for 200mm and 300mm film analysis, respectively. They can be used in several wafer film process steps including metal deposition, CMP, CVD, photolithography and etch. The systems use non-contact visible and/or DUV reflectometry to perform fast and accurate measurements of film thickness and uniformity. The NanoSpec 9000b (BOLTs) is a 300mm system with all the features of the NanoSpec 9000 and is interchangeable with industry conforming load ports for simplified mechanical integration.