概述

The NanoSpec 8000XSE is a stand-alone, automated thin film measurement system that can handle wafers ranging in size from 75 to 200 millimeters in diameter. It includes a fully integrated spectroscopic ellipsometer for ultrathin and multiple film stack measurement applications. An FTIR option can be added to measure the thickness of epi-silicon. The 8000XSE also offers a standard mechanical interface with mini-environment enclosures for use in ultra-clean manufacturing facilities and can be configured to handle substrates used in the magnetic recording head industry.