947
概述
CO2 INJECTOR (CO2 BUBBLER). High quality processing, contamination-free devices. ADT 947 CO2 Inline Injector (CO2 Bubbler) is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.
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