概述

The ULTRATECH Saturn Spectrum 300E is a type of stepper developed by Ultratech Stepper Inc. to meet the increasing demand for thick photoresist exposure in 300mm bump applications. It is part of Ultratech’s advanced-packaging product line. The Saturn Spectrum 300E is designed to provide consistent exposure doses on wafer substrates, resulting in faster production times and fewer issues with non-scalable patterns. Its low numerical aperture (NA) and broadband illumination spectrum allow for a more uniform aerial image through the depth of ultra-thick photosensitive materials, compared to steppers with higher NAs and narrower bandwidths.