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NSR-2205EX10B
概述
Resolution: ≦ 320 nm Exposure light source: KrF excimer laser (248 nm wavelength) Reduction ratio: 1:5 Exposure field: 22 mm square to 17.9 (H) × 25.2 (V) mm Alignment accuracy (EGA, |M| + 3σ): ≦ 80 nm
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