描述
NIKON DUV STEPPER配置
-Software Version: MCSV E3.42, OCSV E3.42, -CIM: SECS -Process: Lithography Exposure Step and Repeat Stepper -Main System NSR Main Body & Control Rack 1 OK -Main System Cymer Laser 1 OK -Main System Temperature Controller Rack 1 OK -Main System -Handler System Wafer Loader Type 3 1 OK -Factory Interface SMIF 2 OKOEM 代工型號說明
The DUV Stepper is an all-in-one KrF system for high-volume production of advanced logic and memory ICs. It features a 0.60 NA sense for 0.25 micron resolution and can process over 85 200mm wafers per hour. The exposure area is 22mm x 22mm.文檔
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NIKON
NSR-2205EX14C
已驗證
類別
Steppers & Scanners
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
103910
晶圓尺寸:
8"/200mm
年份:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2205EX14C
類別
Steppers & Scanners
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
103910
晶圓尺寸:
8"/200mm
年份:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
NIKON DUV STEPPER配置
-Software Version: MCSV E3.42, OCSV E3.42, -CIM: SECS -Process: Lithography Exposure Step and Repeat Stepper -Main System NSR Main Body & Control Rack 1 OK -Main System Cymer Laser 1 OK -Main System Temperature Controller Rack 1 OK -Main System -Handler System Wafer Loader Type 3 1 OK -Factory Interface SMIF 2 OKOEM 代工型號說明
The DUV Stepper is an all-in-one KrF system for high-volume production of advanced logic and memory ICs. It features a 0.60 NA sense for 0.25 micron resolution and can process over 85 200mm wafers per hour. The exposure area is 22mm x 22mm.文檔
無文檔