FPA-1550 MARK II
概述
FPA-1550 Mark II is a G-line stepper with a 0.8 micron resolution, and has a numerical aperture (NA) of 0.43 or 0.35, depending on configuration.
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FPA-1550 Mark II is a G-line stepper with a 0.8 micron resolution, and has a numerical aperture (NA) of 0.43 or 0.35, depending on configuration.
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