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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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PAS 5500/800

概述

The PAS 5500/800 is a deep UV Step & Scan system. The system achieves 120 nm resolution by means of the industry-leading numerical aperture (NA) of 0.80. With throughput of 115 200 mm wafers per hour.

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