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交易市集 > Steppers & Scanners > ASML > TWINSCAN XT:860M

TWINSCAN XT:860M

概述

ASML's TWINSCAN XT:860M is designed using state-of-the-art optics for volume 300 mm wafer production at and below 110 nm resolution. The TWINSCAN XT:860M step-and-scan system is a high-productivity, dual-stage KrF lithography machine designed for volume production of 300 mm wafers at below 110 nm resolution.

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