概述

The PAS 5500/200 was the first stepper to incorporate ASML’s revolutionary AERIAL™ Illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical IC mass production. The i-Line Stepper combines 0.35 micron resolution with outstanding overlay performance. The 5500/200 is among ASML’s most successful types built, and has later been succeeded by an improved version, the PAS 5500/250.