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PAS 5500 / 200A
概述
The ASML PAS 5500 is a lithography platform that shaped ASML’s market success and technology leadership. It became ASML’s longest-lived lithography platform and one of its most versatile product lines1. The PAS 5500 is a versatile machine that can be adapted for many new markets and special applications. ASML PAS 5500 / 200A is Steppers and Scanners system. PAS 5500 / 200A can be used with an 8” wafer size.
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