概述

The ASML PAS 2500/40 is an I-Line (365nm) stepper with a working resolution of 0.7 micron. It is used for IC production on 3, 4, 5 and 6 inch wafers. The PAS 2500/40 stepper uses a 0.40 NA i-line lens with a 21.1mm image field diameter and is optimized for sub 0.7micron production resolutions using i-line processes.