概述

The Trident™ SRD Spin Rinse Dryers from ClassOne Technology provide state-of-the-art cleaning, rinsing, and drying of wafers after wet processing, for chemical or residue removal without leaving water spots or films. These tools utilize DI water rinse followed by N2 drying. The systems’ non-contact heating results in cleaner N2 because a filter is positioned after the heater to eliminate direct contact between the N2 and heater. Trident 8800HP – Dual-stack SRD, able to use high-profile 200mm cassettes