概述

MERCURY+ includes a new, advanced control system that ensures that a proven technology, with over 1,000 systems installed worldwide, will continue to be a solution for years to come. Supporting 75mm – 200mm wafers, the MERCURY+ addresses the industry’s need for a lower-cost batch spray solution. The new MERCURY control system includes replacements for obsolete components such as a new CPU, touchscreen interface, pneumatic card rack, input-output interface and motor speed controller. In addition, the new control system extends the system’s functionality with additional monitoring, data logging and maintenance functions, and is capable of running standard MERCURY processes without the need for requalification.