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RTP-150-HV

類別
RTP/RTA
概述

RTP-150-HV - Rapid Thermal Vacuum Process Oven For wafer size up to 150 mm dia. Ramp up rate up to 75 K/sec SIMATIC® controller with 7“ touch panel Vacuum up to 10-3 hPa Process gas line with Mass Flow Controller for Nitrogen

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