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描述
AST SUPER HEAT SYSTEM配置
-Software Version: DOS 2.0 -CIM: GEM -Process: RTP -Handler System: PRI ALIGNER (1) OK -Options System: PRI ROBOT ATM307 (1) OKOEM 代工型號說明
The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.文檔
無文檔
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
111960
晶圓尺寸:
8"/200mm
年份:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MATTSON / STEAG / AST
2800
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
111960
晶圓尺寸:
8"/200mm
年份:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
AST SUPER HEAT SYSTEM配置
-Software Version: DOS 2.0 -CIM: GEM -Process: RTP -Handler System: PRI ALIGNER (1) OK -Options System: PRI ROBOT ATM307 (1) OKOEM 代工型號說明
The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.文檔
無文檔