描述
Polysilicon Etch配置
Alliance (A6) TCP 9400DSiE -Qty 1 - A6 Platform -Qty 3 - 9400DSiE Chambers 94-1608(F119229-PM2) 94-1673(F137127-PM1) 94-1609(F119229-PM4)OEM 代工型號說明
The TCP 9400DSiE is a deep silicon etch system designed for high-volume production. It offers broad process capability and flexibility for MEMS, advanced packaging, and power semiconductor applications. The system is based on Lam’s TCP 9400 Etch Series and features a patented TCP plasma source for uniform ion flux and high cross-wafer uniformity. Lam’s Waferless AutoClean technology maintains a consistent chamber environment for superior process stability. With over 1,300 chambers installed worldwide, the TCP 9400DSiE is a reliable choice for meeting the challenges of Si DRIE.文檔
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LAM RESEARCH CORPORATION
TCP 9400DSiE
已驗證
類別
RIE
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
83169
晶圓尺寸:
6"/150mm
年份:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
TCP 9400DSiE
類別
RIE
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
83169
晶圓尺寸:
6"/150mm
年份:
2009
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Polysilicon Etch配置
Alliance (A6) TCP 9400DSiE -Qty 1 - A6 Platform -Qty 3 - 9400DSiE Chambers 94-1608(F119229-PM2) 94-1673(F137127-PM1) 94-1609(F119229-PM4)OEM 代工型號說明
The TCP 9400DSiE is a deep silicon etch system designed for high-volume production. It offers broad process capability and flexibility for MEMS, advanced packaging, and power semiconductor applications. The system is based on Lam’s TCP 9400 Etch Series and features a patented TCP plasma source for uniform ion flux and high cross-wafer uniformity. Lam’s Waferless AutoClean technology maintains a consistent chamber environment for superior process stability. With over 1,300 chambers installed worldwide, the TCP 9400DSiE is a reliable choice for meeting the challenges of Si DRIE.文檔
無文檔
類似上架商品
查看全部無類似上架商品