待售二手貨 LAM RESEARCH CORPORATION 2300 VERSYS

描述

無描述

配置

2300v2 Mainframe Serial Number : 1001862-04-19-02493 Chamber Type Serial Number PM 1 Versys Star 23PLO702 PM 2 Versys Star 23PLO464 PM 3 Versys Star 23PLO465 PM 4 2300 Microwave Strip 23MWS080 Mainframe • Number of Cassette / FOUP Positions : 3 • Loadport Make/Model : 3LPM • Software Version : 1.8.4 SP5 HF2 • Signal Lamp Tower • Remote Operator Interface • Robot Type : ATR8 / MAG7 • Robot Part Number : 138150 / 108000-37 • CE Mark Certified • Electrical Requirements : 208V 3PH 50/60HZ Versys Star Chambers • Endpoint Type: Optical Emission Spectrometer • Turbo Pump: ALCATEL ATH 2300 M • RF Generator: AE RFDS 1250 2300 Microwave Strip Chamber • Microwave Generator: MKS FI20160-3 Pumps/Chillers • Loadlock Pump: BOC EDWARDS IPX100 • Etch Chamber Pump: Qty 4 - ALCATEL 602P • Chiller: Qty 3 - BOC EDWARDS 40/80 PLUS <div style="margin-left: 40px;">Electrical Requirements : 200/208 VAC 3 PH 50/60 HZ 30A</div> Gas Box Configuration • Mounting Location : Side • MFC Make and Model : CELERITY UFC1661 / HORIBA Z 313 • Gas Box P/N – PM1 : NA • Gas Box P/N – PM2 : 571-004400-004 • Gas Box P/N – PM3 : 571-004400-004 • Gas Box P/N – PM4 : 571-004400-004 Gas Configuration Line PM 1 PM 2 PM 3 PM 4 1 SiCl4_5 SiCl4_5 SiCl4_5 N2_1000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 2 N2_200 N2_200 N2_200 O2_5000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 3 Cl2_200 Cl2_200 Cl2_200 CF4_100 HORIBA HORIBA HORIBA CELERITY Z 313 Z 313 Z 313 UFC1661 4 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 5 O2_200 O2_200 O2_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 6 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 7 Ar_200 Ar_200 Ar_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 8 CH2F2_100 CH2F2_100 CH2F2_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 9 O2_20 O2_20 O2_20 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 10 SF6_200 SF6_200 SF6_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 11 CF4_200 CF4_200 CF4_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 12 CHF3_100 CHF3_100 CHF3_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661

OEM 代工型號說明

The 2300 Versys is a part of Lam’s 2300 etch series, which is a low-risk solution for sub-100-nm volume production on 300-mm substrates. It has a compact design that reduces floor space while providing full service access. The Versys conductor etch systems rely on Lam’s Transformer Coupled Plasma™ source and deliver superior performance. It also reduces cost of ownership to compete with the lowest cost systems in the industry.