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描述
無描述配置
無配置OEM 代工型號說明
The OmniMap® RS75 series is a tool designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. The RS75 series is offered in a variety of configurations to meet customer production requirements, including automated and manual versions, both of which are available with or without temperature compensation. Models include the Auto RS75/tc, RS75/tc, Auto RS75, and the RS75.文檔
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KLA
RS75/TCA
類別
Resistivity / Four Point Probe
上次驗證: 18 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
126576
晶圓尺寸:
未知
年份:
2001
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描述
無描述配置
無配置OEM 代工型號說明
The OmniMap® RS75 series is a tool designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. The RS75 series is offered in a variety of configurations to meet customer production requirements, including automated and manual versions, both of which are available with or without temperature compensation. Models include the Auto RS75/tc, RS75/tc, Auto RS75, and the RS75.文檔
無文檔