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描述
Omnimap Resistivity Mapping System配置
無配置OEM 代工型號說明
The RS-100 is a production-worthy resistivity measurement system used in nearly all fabs worldwide. It provides advanced automation and improved edge performance for 300mm wafers. It has accurate and repeatable resistivity measurements up to 1mm from the conductive film edge, patented temperature compensation, and easy-to-use software. It is used in metal deposition, CMP, ion implantation, and diffusion. Its enhanced edge performance provides greater insight into process control variance and lowers cost-of-ownership.文檔
無文檔
KLA
RS100
類別
Resistivity / Four Point Probe
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
82527
晶圓尺寸:
未知
年份:
2000
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Refurbishment Services
Available
描述
Omnimap Resistivity Mapping System配置
無配置OEM 代工型號說明
The RS-100 is a production-worthy resistivity measurement system used in nearly all fabs worldwide. It provides advanced automation and improved edge performance for 300mm wafers. It has accurate and repeatable resistivity measurements up to 1mm from the conductive film edge, patented temperature compensation, and easy-to-use software. It is used in metal deposition, CMP, ion implantation, and diffusion. Its enhanced edge performance provides greater insight into process control variance and lowers cost-of-ownership.文檔
無文檔