概述

With its patented architecture, the Prismo A7® system can accommodate up to 4 reactors and process up to 136 4-inch wafers or 56 6-inch wafers simultaneously. It is extendible to 8-inch wafer production. Each reactor is controlled independently – a novel design that enables exceptional manufacturing flexibility. The Prismo A7 is engineered for high throughput LED production with its 716mm diameter susceptor. It is currently the throughput advanced MOCVD system in the industry with the advantage of consumption per unit.