Close Coupled Showerhead (CCS) system. Intended for research on gallium nitride (GaN)-based deep-ultraviolet (DUV) optoelectronic devices.



The AIXTRON Group provides deposition equipment to the semiconductor industry. They are used for a wide range of manufacturing high-performance components for electronic and optoelectronic applications based on compound or organic semiconductor materials. These components are used in a variety of innovative applications, technologies and industries. These include, for example, LED and display technology, data transmission, sensor technology, energy management and conversion, communication, signal and lighting technology, and many other sophisticated high-tech applications.

3x2 CCS

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