The Nimbus is a high throughput sputter deposition system. The unique and patented architecture incorporates the essential process steps in three vacuum chambers linked by a unique substrate transport system. This small footprint system, with ease of maintenance designed in, stands out in the market as providing outstanding cost of ownership.
Nimbus 300 - robotic wafer handling 100 to 200 mm.

NEXX Systems found in 2001. In 2012 Tokyo Electron acquired NEXX and renamed it TEL NEXX, Inc. In 2018 ASMPT acquired the company and renamed it ASM NEXX, Inc.
ASM NEXX is a worldwide leading supplier of metallization Advanced Packaging Deposition Equipment specializing in sputtering (PVD) and plating (ECD) processes.

NIMBUS 300

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