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交易市集 > PECVD > ASM > EAGLE 10

EAGLE 10

類別
PECVD
概述

The Eagle is a single-wafer processing product platform for PECVD applications. Eagle 10 is a system for 150 and 200mm wafers. Eagle 10 PECVD, single wafer, TEOS intermetal dielectric, nitride passivation applications.

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