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6" Fab For Sale from Moov - Click Here to Learn More
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55K PECVD

類別
PECVD
概述

AKT-55K PECVD(2,200mm x 2,500mm) PECVD systems deposit doped and undopedamorphous silicon, silicon nitride, silicon oxide and oxynitride PECVD systems deposit films on glass substrates more than 70 times larger than 300mm wafers

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