The Suprema III utilizes the advanced processing technology of the Suprema XP, while reducing both the amount of factory space required for installation and the operating cost per wafer of the new system.

Mattson Technology, Inc. designs, manufactures, markets and globally supports semiconductor wafer processing equipment used in the fabrication of integrated circuits. Supplier of plasma and rapid thermal processing (RTP) equipment to the global semiconductor industry, and operate in four primary product sectors: Dry Strip, Etch, Rapid Thermal Processing and Millisecond Anneal.

SUPREMA III

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