描述
This tool is powered off and de-installed.配置
Reticle : 5 inchOEM 代工型號說明
FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5文檔
無文檔
CANON
FPA-2500i3
已驗證
類別
Steppers & Scanners
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
103997
晶圓尺寸:
6"/150mm
年份:
1994
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
類似上架商品
查看全部
CANON
FPA-2500i3
類別
Steppers & Scanners
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
103997
晶圓尺寸:
6"/150mm
年份:
1994
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
This tool is powered off and de-installed.配置
Reticle : 5 inchOEM 代工型號說明
FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5文檔
無文檔