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OXFORD PLASMALAB 100 DRY / PLASMA ETCH

描述

無描述

配置

1. Process module (ICP-RIE Etch, PECVD) . Process Chamber Inside 2. Loadlock (outside & Inside) 3. Gas Supply (ICP-RIE Etch, PECVD) -Gas Supply (for ICP-RIE Etch) ✓ HBr 50sccm ✓ BCl3 50sccm ✓ Cl2 50sccm ✓ SF6 100sccm ✓ Ar 100sccm ✓ O2 100sccm -Gas Supply (for PECVD) ✓ 5%SiH4/N2 1000sccm ✓ NH3 50sccm ✓ N2O 2000sccm ✓ N2 2000sccm ✓ O2 200sccm ✓ CF4 500sccm 4. Chiller 5. Power Transfer 6. PC * Pump : not included

OEM 代工型號說明

未提供

文檔

文件圖示

Configuration_Plasmalab 100 (ICP380).pdf

文件圖示

Configuration_Plasmalab 100 (PECVD).pdf

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

verified-listing-icon

已驗證

類別

Dry / Plasma Etch

上次驗證: 2 天前

關鍵商品詳情

條件:

Used

作業狀態:

未知

產品編號:

103544

晶圓尺寸:

未知

年份:

未知

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

類似上架商品

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch

年份: 0條件: 二手

上次驗證2 天前

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch

年份: 0條件: 二手

上次驗證2 天前

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch

年份: 0條件: 二手

上次驗證2 天前

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch

年份: 0條件: 二手

上次驗證2 天前

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch

年份: 0條件: 二手

上次驗證2 天前

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

verified-listing-icon

已驗證

類別

Dry / Plasma Etch

上次驗證: 2 天前

listing-photo-7360eb2e1f8840348f90ae092ba9be66-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74764/7360eb2e1f8840348f90ae092ba9be66/2188d763a29642d49621125e12be6632_oxfordplasamlab100pecvd%2Bicpsepartetoolspage02image0002_mw.jpg

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關鍵商品詳情

條件:

Used

作業狀態:

未知

產品編號:

103544

晶圓尺寸:

未知

年份:

未知

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

描述

無描述

配置

1. Process module (ICP-RIE Etch, PECVD) . Process Chamber Inside 2. Loadlock (outside & Inside) 3. Gas Supply (ICP-RIE Etch, PECVD) -Gas Supply (for ICP-RIE Etch) ✓ HBr 50sccm ✓ BCl3 50sccm ✓ Cl2 50sccm ✓ SF6 100sccm ✓ Ar 100sccm ✓ O2 100sccm -Gas Supply (for PECVD) ✓ 5%SiH4/N2 1000sccm ✓ NH3 50sccm ✓ N2O 2000sccm ✓ N2 2000sccm ✓ O2 200sccm ✓ CF4 500sccm 4. Chiller 5. Power Transfer 6. PC * Pump : not included

OEM 代工型號說明

未提供

文檔

文件圖示

Configuration_Plasmalab 100 (ICP380).pdf

文件圖示

Configuration_Plasmalab 100 (PECVD).pdf

類似上架商品

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch年份: 0條件: 二手上次驗證:2 天前

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch年份: 0條件: 二手上次驗證:2 天前

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch年份: 0條件: 二手上次驗證:2 天前

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch年份: 0條件: 二手上次驗證:2 天前

OXFORD PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Dry / Plasma Etch年份: 0條件: 二手上次驗證:2 天前