描述
There are 3 main problems with the system: 1) Neither AMU is in working condition 2) There is an internal leak in the system, which we believe is coming from CDA and/or related to the slit valve. 3) The backing pumps have failed repeated, likely related to vacuum leak The status of parts on the tool: 1) ICP AMU – Installed, not working 2) RIE AMU – Not installed, but we have the original unit. The original unit does not work. 3) ICP Power Supply – Not installed. Unsure if working. 4) Endpoint detection system – Not installed. Unsure if working. 5) Backing pump – None, two prior pumps have failed 6) All other parts of the tool are present and installed. Besides the vacuum leak, all other parts were working at last shutdown.配置
Gases: -Process Delivery Line -CH4 – Methane -H2 – Hydrogen -CHF3 – Trifluoromethane -O2 – Oxygen -CF4 – Tetraflouromethane -Ar – Argon -N2 – Nitrogen -HBr – Hydrogen BromineOEM 代工型號說明
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類別
Dry / Plasma Etch
上次驗證: 3 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116201
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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OXFORD
PLASMALAB 100 DRY / PLASMA ETCH
類別
Dry / Plasma Etch
上次驗證: 3 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116201
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
There are 3 main problems with the system: 1) Neither AMU is in working condition 2) There is an internal leak in the system, which we believe is coming from CDA and/or related to the slit valve. 3) The backing pumps have failed repeated, likely related to vacuum leak The status of parts on the tool: 1) ICP AMU – Installed, not working 2) RIE AMU – Not installed, but we have the original unit. The original unit does not work. 3) ICP Power Supply – Not installed. Unsure if working. 4) Endpoint detection system – Not installed. Unsure if working. 5) Backing pump – None, two prior pumps have failed 6) All other parts of the tool are present and installed. Besides the vacuum leak, all other parts were working at last shutdown.配置
Gases: -Process Delivery Line -CH4 – Methane -H2 – Hydrogen -CHF3 – Trifluoromethane -O2 – Oxygen -CF4 – Tetraflouromethane -Ar – Argon -N2 – Nitrogen -HBr – Hydrogen BromineOEM 代工型號說明
未提供文檔
無文檔