描述
Ashable Hard Mask CVD配置
Software Version: 6.07B93_2.30B36 CIM: E84, SECS/GEM, GEM300, Interface A Process: TFM_Ashable HM Amorphous Carbon System Type Description Quantity Status Main System: Vector Express AHMxT System 1 OK Handler System: FOUP RF ID Reader 2 OK Factory Interface: FOUP 3 OK Options System: Pressure Display Package 1 OK Options System: Ionizer Kit 1 OK Options System: Heated Process Manometer 1 OK Options System: Secondary Isolation Kit 1 OK Options System: EBR Capable Loadlock 1 OK Options System: High Temperature Process Kit 1 OKOEM 代工型號說明
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LAM RESEARCH / NOVELLUS
VECTOR EXPRESS AHM
已驗證
類別
PECVD
上次驗證: 28 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
92332
晶圓尺寸:
12"/300mm
年份:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
類似上架商品
查看全部LAM RESEARCH / NOVELLUS
VECTOR EXPRESS AHM
類別
PECVD
上次驗證: 28 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
92332
晶圓尺寸:
12"/300mm
年份:
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Ashable Hard Mask CVD配置
Software Version: 6.07B93_2.30B36 CIM: E84, SECS/GEM, GEM300, Interface A Process: TFM_Ashable HM Amorphous Carbon System Type Description Quantity Status Main System: Vector Express AHMxT System 1 OK Handler System: FOUP RF ID Reader 2 OK Factory Interface: FOUP 3 OK Options System: Pressure Display Package 1 OK Options System: Ionizer Kit 1 OK Options System: Heated Process Manometer 1 OK Options System: Secondary Isolation Kit 1 OK Options System: EBR Capable Loadlock 1 OK Options System: High Temperature Process Kit 1 OKOEM 代工型號說明
未提供文檔
無文檔