ASM is a supplier of semiconductor process equipment for wafer processing, including lithography, deposition, ion implant and single-wafer epitaxy. ASM is part of the ASM International NV group that also includes ASM Pacific Technology (ASMPT). ASMPT, in which ASMI holds a substantial ownership is a leading supplier of semiconductor process equipment for wafer assembly and packaging, and for surface mount technology.

The Eagle is a single-wafer processing product platform for PECVD applications. Eagle 10 is a system for 150 and 200mm wafers.
Eagle 10 PECVD, single wafer, TEOS intermetal dielectric, nitride passivation applications.

ASM

EAGLE 10

PECVD

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