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描述
2 Chamber: PE CVD配置
2 Chamber: PE CVDOEM 代工型號說明
The Eagle is a single-wafer processing product platform for PECVD applications. Eagle 10 is a system for 150 and 200mm wafers. Eagle 10 PECVD, single wafer, TEOS intermetal dielectric, nitride passivation applications.文檔
無文檔
ASM
EAGLE 10
類別
PECVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
105246
晶圓尺寸:
8"/200mm
年份:
1998
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描述
2 Chamber: PE CVD配置
2 Chamber: PE CVDOEM 代工型號說明
The Eagle is a single-wafer processing product platform for PECVD applications. Eagle 10 is a system for 150 and 200mm wafers. Eagle 10 PECVD, single wafer, TEOS intermetal dielectric, nitride passivation applications.文檔
無文檔