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5200XP
類別
Overlay概述
The KLA-Tencor 5200XP is an automated overlay metrology tool for the semiconductor industry. It improves overlay control, maximizes lithography tool utilization, and meets the requirements of 0.18 µm design rules. It has the highest throughput in the industry and is compatible with current factory automation standards.
活躍中的上架商品
8
服務
檢驗、保險、評估、物流
