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描述
無描述配置
5x8" (five eight inch wafers) configuration Penta Injector, Full Penta Panel EpiTT Version 1 Single filter exhaust CT500 TMGax2, TMAlx2, Cp2Mg H2, N2, Nh3, Cl2 (no mixer) that was external of the system Aixact version 7.1.2.8 Process Pump Ebara ESA80 Two scroll pumps one for glove box the other for the Antechamber Horiba MFC's Line heating on MO dopant line from Bubbler to Penta PanelOEM 代工型號說明
未提供文檔
無文檔
AIXTRON
AIX G5+
類別
MOCVD
上次驗證: 10 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
98810
晶圓尺寸:
未知
年份:
2013
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
5x8" (five eight inch wafers) configuration Penta Injector, Full Penta Panel EpiTT Version 1 Single filter exhaust CT500 TMGax2, TMAlx2, Cp2Mg H2, N2, Nh3, Cl2 (no mixer) that was external of the system Aixact version 7.1.2.8 Process Pump Ebara ESA80 Two scroll pumps one for glove box the other for the Antechamber Horiba MFC's Line heating on MO dopant line from Bubbler to Penta PanelOEM 代工型號說明
未提供文檔
無文檔