描述
MOCVD配置
- Five 8" wafers - Penta Injector - EpiTT Version 1 - Single filter exhaust CT500 - TMGax2, TMAlx2, Cp2Mg - H2, N2, Nh3,Cl2 (no mixer) that was external of the system - Aixact version 7.1.2.8 - Ebara ESA80 process pump - Two scroll pumps: for the glove box (1) and the Antechamber (1) - Horiba MFC's - Process module 208VAC, RF Generator 480VAC - USA Voltage - No transfer modulesOEM 代工型號說明
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AIXTRON
AIX G5+
已驗證
類別
MOCVD
上次驗證: 26 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
96865
晶圓尺寸:
未知
年份:
2013
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
類似上架商品
查看全部AIXTRON
AIX G5+
類別
MOCVD
上次驗證: 26 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
96865
晶圓尺寸:
未知
年份:
2013
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
MOCVD配置
- Five 8" wafers - Penta Injector - EpiTT Version 1 - Single filter exhaust CT500 - TMGax2, TMAlx2, Cp2Mg - H2, N2, Nh3,Cl2 (no mixer) that was external of the system - Aixact version 7.1.2.8 - Ebara ESA80 process pump - Two scroll pumps: for the glove box (1) and the Antechamber (1) - Horiba MFC's - Process module 208VAC, RF Generator 480VAC - USA Voltage - No transfer modulesOEM 代工型號說明
未提供文檔
無文檔