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AIXTRON AIX 2600 G3 IC
  • AIXTRON AIX 2600 G3 IC
  • AIXTRON AIX 2600 G3 IC
描述
無描述
配置
Model 2600 G3 IC R Software Version AIXACT 5.8.3.16 PLC 3.13.3 SLC ‐ Process AlInGaP MOCVD Epitaxy Wafer Config & Size 7 x 6" Metal Organic Sources TMIn x 3, TMGa x 2, TMAl x 1, Cp2Mg x 1, DIPTe x 1, Spare x 3 Hydride Sources PH3 x 1, AsH3 x 1, 100 ppm SiH4 in Ar x 1 Concentration Monitors Epison4 x 3 for TMIn Chiller Baths 6 available for MO Sources Purifiers Entegris getter for H2 Filters ‐ Heating System RF Coil with Trumpf Huttinger RF Generator BIG 120/50 Glove Box MBraun Nitrogen Glovebox with controller Exhaust System Custom Built Exhaust System Process Pump Kashiyama SDE300 DOR & Glove Box Pumps Adixen ACP ‐ 15G x 2 Spare Parts Potentially some available Aixtron 2600 G3 IC R MOCVD Reactor Specifications Abatement ‐ Reactor Chiller Affinity Recirculating Closed Loop Chiller Ceiling Quartz Ceiling with temperature control In‐Situ Pyrometry Laytec EpiTT with EpiNET 2.2 for feedback temperature control Gas Foil Rotation (GFR) Active Spare Channels Yes ‐ TBD
OEM 代工型號說明
未提供
文檔

無文檔

類別
MOCVD

上次驗證: 超過60天前

關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

125707


晶圓尺寸:

未知


年份:

2007


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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AIXTRON

AIX 2600 G3 IC

verified-listing-icon
已驗證
類別
MOCVD
上次驗證: 超過60天前
listing-photo-4ab1a38942154fa1b9a1eac7b0e95e9a-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73774/4ab1a38942154fa1b9a1eac7b0e95e9a/cf295823d26b43e4a742f074c0e717a2_45e504e7c06a4584a99e9cafed0c7d5d_mw.jpeg
listing-photo-4ab1a38942154fa1b9a1eac7b0e95e9a-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73774/4ab1a38942154fa1b9a1eac7b0e95e9a/3c1e2714fbf34ce39d5483fc609eddd3_df72a75c32f74124818c903d02361b1c_mw.jpeg
關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

125707


晶圓尺寸:

未知


年份:

2007


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述
配置
Model 2600 G3 IC R Software Version AIXACT 5.8.3.16 PLC 3.13.3 SLC ‐ Process AlInGaP MOCVD Epitaxy Wafer Config & Size 7 x 6" Metal Organic Sources TMIn x 3, TMGa x 2, TMAl x 1, Cp2Mg x 1, DIPTe x 1, Spare x 3 Hydride Sources PH3 x 1, AsH3 x 1, 100 ppm SiH4 in Ar x 1 Concentration Monitors Epison4 x 3 for TMIn Chiller Baths 6 available for MO Sources Purifiers Entegris getter for H2 Filters ‐ Heating System RF Coil with Trumpf Huttinger RF Generator BIG 120/50 Glove Box MBraun Nitrogen Glovebox with controller Exhaust System Custom Built Exhaust System Process Pump Kashiyama SDE300 DOR & Glove Box Pumps Adixen ACP ‐ 15G x 2 Spare Parts Potentially some available Aixtron 2600 G3 IC R MOCVD Reactor Specifications Abatement ‐ Reactor Chiller Affinity Recirculating Closed Loop Chiller Ceiling Quartz Ceiling with temperature control In‐Situ Pyrometry Laytec EpiTT with EpiNET 2.2 for feedback temperature control Gas Foil Rotation (GFR) Active Spare Channels Yes ‐ TBD
OEM 代工型號說明
未提供
文檔

無文檔

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查看全部

無類似上架商品