概述

The Orion NanoFab Helium Ion Microscope (HIM) operates using ionized Helium or Neon gases rather than electrons for imaging and milling of materials. Helium is typically used for imaging and milling very thin films (e.g. graphene), with a spot size ~0.5 nm. Neon is is heavier, and thus better adapted for milling bulk materials and thin films with a spot size of ~2 nm.