The D-300 system includes an innovative optical lever sensor technology that provides 1000 μm vertical range, sub-Angstrom resolution plus low force, 0.5 to 15 mg. The ability to measure a wide range of applications, from nanometer to millimeter steps, high-resolution roughness, soft materials and thin film stress enable the D-300 to serve various industries in research and development as well as production measurements. The D-300 includes a 140 mm manual stage. The system includes advanced optics, a high-resolution 5 MP camera with a 4x digital zoom and enhanced video controls for highly versatile sample visualization.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

ALPHA-STEP D-300

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