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交易市集 > Metrology > KLA > SpectraShape 8660

SpectraShape 8660

類別
Metrology
概述

The SpectraShape 8660 and 8810 optical CD and shape metrology systems. The new SpectraShape systems fully characterize and monitor the critical dimensions and three-dimensional shapes of geometrically complex features incorporated by some IC manufacturers in their latest generation devices.

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