描述
Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room配置
*. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHgOEM 代工型號說明
未提供文檔
無文檔
KLA
RS35
已驗證
類別
Metrology
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
66001
晶圓尺寸:
8"/200mm
年份:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
RS35
已驗證
類別
Metrology
上次驗證: 超過30天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
66001
晶圓尺寸:
8"/200mm
年份:
1998
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room配置
*. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHgOEM 代工型號說明
未提供文檔
無文檔