描述
無描述配置
NV-8250HT - 250KeV • Number of Cassettes : 02 • Loading Configuration : SMIF • Original Ship Date from OEM : 16/10/2001 • Software Version : 5.1.3 User ID: EES • Sun SPARCStation Version : Ultra Work Station • SPC Productivity Software • Auto Startup and Computer Monitoring • Electrical Requirements : 208V / 100A • GEM/SECS Interface • SECS II Interface Wafer Handling o Automatic Flat or Notch Alignment Capability w/buffer cassette o Programmable flat orient o Wafer Rotation o Slot-to-Slot Wafer Integrity o Programmable Auto Tilt : 0-60 deg o ESC o Fast Maintenance Kit Machine Configuration o Remote Monitor o Single Stage Extraction : 15-40kV Ion Source Type : ELS o Source Material Type : Moly o Vaporizer : Dual o NV-8250 Energy Filter System o NV-8250 Target Positioning/Scanning System o Parallel Beam Using Hybrid Scanning o Signal Tower : No o On-Board Cryos o Beamline and Source Pumps Source Pump : Pfeiffer Beam Line Pump : Pfeiffer End Station Pump : Pfeiffer Gas Configuration Gas Type MFC Type and Model BF3 UNIT-1662 SDS PH3 UNIT-1662 SDS AsH3 UNIT-1662 SDS InCl3 UNIT-1662 Solid Support Equipment • Cyro Compressors: Qty 1 CTI-9600 • Vacuum Pumps: Qty 1 Pfeiffer • Remote Disk Chiller: Qty 1Affinity • Scrubber: CS Clean CS195SCOEM 代工型號說明
200mm high tilt and medium current applications for all chips.文檔
無文檔
SEN CORPORATION / SUMITOMO
NV 8250HT
已驗證
類別
Medium Current
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
16281
晶圓尺寸:
8"/200mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SEN CORPORATION / SUMITOMO
NV 8250HT
已驗證
類別
Medium Current
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
16281
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
NV-8250HT - 250KeV • Number of Cassettes : 02 • Loading Configuration : SMIF • Original Ship Date from OEM : 16/10/2001 • Software Version : 5.1.3 User ID: EES • Sun SPARCStation Version : Ultra Work Station • SPC Productivity Software • Auto Startup and Computer Monitoring • Electrical Requirements : 208V / 100A • GEM/SECS Interface • SECS II Interface Wafer Handling o Automatic Flat or Notch Alignment Capability w/buffer cassette o Programmable flat orient o Wafer Rotation o Slot-to-Slot Wafer Integrity o Programmable Auto Tilt : 0-60 deg o ESC o Fast Maintenance Kit Machine Configuration o Remote Monitor o Single Stage Extraction : 15-40kV Ion Source Type : ELS o Source Material Type : Moly o Vaporizer : Dual o NV-8250 Energy Filter System o NV-8250 Target Positioning/Scanning System o Parallel Beam Using Hybrid Scanning o Signal Tower : No o On-Board Cryos o Beamline and Source Pumps Source Pump : Pfeiffer Beam Line Pump : Pfeiffer End Station Pump : Pfeiffer Gas Configuration Gas Type MFC Type and Model BF3 UNIT-1662 SDS PH3 UNIT-1662 SDS AsH3 UNIT-1662 SDS InCl3 UNIT-1662 Solid Support Equipment • Cyro Compressors: Qty 1 CTI-9600 • Vacuum Pumps: Qty 1 Pfeiffer • Remote Disk Chiller: Qty 1Affinity • Scrubber: CS Clean CS195SCOEM 代工型號說明
200mm high tilt and medium current applications for all chips.文檔
無文檔