概述

The XR120S is a 300mm Batch High Current Ion Implanter from Applied Materials that provides an extended energy range up to 120keV for singly-charged implant species and up to 360keV for multiply charged species. This allows the tool to perform a large number of implants traditionally performed on medium current ion implanters. It also provides a low-risk extension to 300mm with maximum process transparency by sharing a common beamline family with existing 200mm products.