概述

Mutech microsystems microAligner is a compact high value UV mask aligner designed for microfabrication applications. It allows for easy fabrication of multilayer devices on a multitude of photoresists, with excellent exposure quality. The easy to use, 7 inch touchscreen based control allows the user to align using the calibrated digital microscope and the X-Y-R micrometer based alignment stage. The fully electronic wafer pressure and gap control allows for easy alignment and very high repeatability of the exposure conditions between processes.