概述

Resolution (L/S): 3.5 µm (g+h+i-line) Projection magnification: 1:1 Overlay: ≦ ±0.6 µm Maximum plate size: 2,200 mm × 2,500 mm Takt time: 60 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2